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XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... |  Download Scientific Diagram
XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram

Electrochemical interaction evaluation between Cu/Ru films and... |  Download Scientific Diagram
Electrochemical interaction evaluation between Cu/Ru films and... | Download Scientific Diagram

IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for  Metallisation of Advanced Interconnects
IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects

Demonstration of Ru as the 4th ferromagnetic element at room temperature |  Nature Communications
Demonstration of Ru as the 4th ferromagnetic element at room temperature | Nature Communications

Push — Filmas pakalpojumā Google Play
Push — Filmas pakalpojumā Google Play

Area-Selective Atomic Layer Deposition of Ruthenium Using a Novel Ru  Precursor and H2O as a Reactant | Chemistry of Materials
Area-Selective Atomic Layer Deposition of Ruthenium Using a Novel Ru Precursor and H2O as a Reactant | Chemistry of Materials

Electrochemical Growth of Cu(Ru) Films via Underpotential Deposition of Pb,  Surface-Limited Redox Replacement of Cu, and Underpotential Deposition of Ru  | SpringerLink
Electrochemical Growth of Cu(Ru) Films via Underpotential Deposition of Pb, Surface-Limited Redox Replacement of Cu, and Underpotential Deposition of Ru | SpringerLink

Color online Sheet resistance and Ru layer density of Ru thin film on... |  Download Scientific Diagram
Color online Sheet resistance and Ru layer density of Ru thin film on... | Download Scientific Diagram

IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for  Metallisation of Advanced Interconnects
IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects

Current-voltage(I-V) for Ru Films of different thickness on the glass... |  Download Scientific Diagram
Current-voltage(I-V) for Ru Films of different thickness on the glass... | Download Scientific Diagram

BALD Engineering - Born in Finland, Born to ALD: Low temperature ALD of  Rutheium using H2O as co-reactant
BALD Engineering - Born in Finland, Born to ALD: Low temperature ALD of Rutheium using H2O as co-reactant

a,b). The dependence of Ru film thickness on the number of ALD cycles... |  Download Scientific Diagram
a,b). The dependence of Ru film thickness on the number of ALD cycles... | Download Scientific Diagram

Enhanced Electrical Properties of an Al-Doped TiO2 Dielectric Film on a TiN  Electrode by Adopting an Atomic Layer Deposited Ru Interlayer | ACS Applied  Electronic Materials
Enhanced Electrical Properties of an Al-Doped TiO2 Dielectric Film on a TiN Electrode by Adopting an Atomic Layer Deposited Ru Interlayer | ACS Applied Electronic Materials

XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... |  Download Scientific Diagram
XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram

Interfacial interaction behaviour analysis between Cu/Ru films and... |  Download Scientific Diagram
Interfacial interaction behaviour analysis between Cu/Ru films and... | Download Scientific Diagram

Hydrogen diffusion through Ru thin films - ScienceDirect
Hydrogen diffusion through Ru thin films - ScienceDirect

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of  Materials
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of  Materials
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials

PDF] Growth and nanostructure of conformal ruthenium films by liquid-source  metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A.  Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513
PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513

Dependence of Ru film thickness and resistivity on the amount of ALD... |  Download Scientific Diagram
Dependence of Ru film thickness and resistivity on the amount of ALD... | Download Scientific Diagram

Anomalous Optoelectric Properties of an Ultrathin Ruthenium Film with a  Surface Oxide Layer for Flexible Transparent Conducting Electrodes - Oh -  2022 - Advanced Functional Materials - Wiley Online Library
Anomalous Optoelectric Properties of an Ultrathin Ruthenium Film with a Surface Oxide Layer for Flexible Transparent Conducting Electrodes - Oh - 2022 - Advanced Functional Materials - Wiley Online Library

Bipolar Energetics and Bifunctional Catalytic Activity of a Nanocrystalline  Ru Thin-Film Enable High-Performance Photoelectrochemical Water Reduction  and Oxidation | ACS Applied Materials & Interfaces
Bipolar Energetics and Bifunctional Catalytic Activity of a Nanocrystalline Ru Thin-Film Enable High-Performance Photoelectrochemical Water Reduction and Oxidation | ACS Applied Materials & Interfaces

CMP performance for Cu and Ru films as a function of inhibitor... |  Download Scientific Diagram
CMP performance for Cu and Ru films as a function of inhibitor... | Download Scientific Diagram

Resistivity vs thickness for c-axis single crystal Ru films deposited... |  Download Scientific Diagram
Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram

Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for  Photoelectrochemical Water Splitting | HTML
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML

Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for  Photoelectrochemical Water Splitting | HTML
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML

a) In situ QCM measurements of mass variations for a Ru film during... |  Download Scientific Diagram
a) In situ QCM measurements of mass variations for a Ru film during... | Download Scientific Diagram

Schematic models of AB-type Ru ALD using the sequences Ru(EtCp) 2 −O 2... |  Download Scientific Diagram
Schematic models of AB-type Ru ALD using the sequences Ru(EtCp) 2 −O 2... | Download Scientific Diagram